- Country: USA
- Summary: Plasma Diagnostic Suite
- UST Ref No: 103141258
- Deadline: 08 Jul 2024
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: NIST-SS24-CHIPS-0073
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- Description:
- Description
NIST Nanocalorimetry for Semiconductors and Semiconductor Process Metrology project requires a plasma diagnostic suite (PDS) which will be used as a benchmark for testing the NIST Nanocalorimetry platform for plasma semiconductor process metrology under the CHIPS act. The plasma diagnostic suit will include a Langmuir probe for general bulk plasma characterization, Retarding field ion energy analyzer, Quartz microbalance sensor for plasma deposition monitoring (if any) and reactive radicals flux monitoring. The PDS will be used inside the same test plasma reactor chamber where Nanocalorimetry plasma sensors (NPS) will be tested to evaluate the performance of NPS against the state-of-the-art PDS.
NIST is seeking information from sources that may be capable of providing a commercial item solution that meets or exceeds the following draft minimum specifications:
1. Langmuir probe for bulk plasma diagnostics in three custom built chambers
1.1. Total probe length: 500 mm -550 mm.
1.2. Movable design for spatial diagnostics, such that the probe sensor position can be moved in and out at least 250 mm.
1.3. Sensitivity: 15nA - 150mA
1.4. Replaceable tips and in-situ tips self-cleaning capability
1.5. RF signal filters for: 13.56 MHz, 94 MHz, 40 kHz excitations
1.6. Capability of collect time-averaged, time-resolved and triggered electrical measurements with frequencies 100 Hz
1.7. High Vacuum compatibility and operational temperature up to T=100 C
2. Sensors for substrate level plasma diagnostics
2.1. Retarding Field Energy Analyzer for ion velocity and energy distribution in RF plasma (frequency range 100 kHz up to 80 MHz); with ion flux sensitivity better than 10-4 A/cm2 up to 10-7 A/cm2; with max RF bias +/-800 V and max DC bias 1000 V.
2.2. Integrated quartz crystal microbalance sensor covered with sp2 carbon film for etching rate measurements by reactive radicals.
2.3. Temperature co... - Documents:
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CLICK HERE TO LOGINPlasma Diagnostic Suite - USA Tender
The COMMERCE, DEPARTMENT OF, a Government sector organization in USA, has announced a new tender for Plasma Diagnostic Suite. This tender is published on USARFP under UST Ref No: 103141258 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2024-07-08.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
