- Country: USA
- Summary: Sources Sought Notice for EUV Reflectometer for SURF III
- UST Ref No: 115576230
- Deadline: 14 Mar 2025
- Financier: Self Financed
- Purchaser Ownership: Government
- Tender Value: Refer Document
- Notice Type: Tender
- Document Ref. No.: NIST-FY25-CHIPS-0070
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- Description:
- Description
The National Institute of Standards and Technology (NIST) has been conducting Extreme Ultraviolet (EUV) metrology for over fifty years. The metrology services are provided for Industry, academia and Government customers for a wide variety of applications. NIST-s EUV metrology effort relies on the Synchrotron Ultraviolet Radiation Facility (SURF III) as its primary EUV light source for both source-based and detector-based radiometric measurements. One of the beamlines (beamline 7) located on SURF III includes a grazing incidence monochromator and reflectometer facility for reflectance measurements in the EUV region. This sources sought is for a replacement reflectometer vacuum chamber and goniometer for beamline 7 to provide improved performance, reliability and efficiency. The beamline 7 monochromator is also to be replaced which is a subject of an additional sources sought request. (Notice ID:
NIST-FY25-CHIPS-0067 on SAM.gov)
NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements:
Location: The Reflectometer shall be installed at the SURF III facility at NIST-s Gaithersburg campus. SURF III operates with the following conditions:
Electron Energy: 380 MeV
Electron beam Radius of Curvature: 0.83 m
Frequency: 114 MHz (2 bunches @ 57 MHz)
Beam current: 300 mA to 100 mA
Beam size (H x W, FWHM): 2 mm x 3.56 mm - 3.2 mm, (depending on beam current)
Beam height: 157.5 cm above floor
The reflectometer must occupy available space:
Reflectometer shall be located in the existing laboratory space with the goniometer-s motions centered at the beamline 7 monochromator-s output approximately 402 cm (TBD, based on monochromator-s design) along line of sight from the radiation wall.
Height of exit slit: 114 cm from laboratory floor. (estimated, TBD based on monochromator-s design... - Documents:
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CLICK HERE TO LOGINSources Sought Notice for EUV Reflectometer for SURF III - USA Tender
The COMMERCE, DEPARTMENT OF | NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, a Government sector organization in USA, has announced a new tender for Sources Sought Notice for EUV Reflectometer for SURF III. This tender is published on USARFP under UST Ref No: 115576230 and is categorized as a Tender. Interested and eligible suppliers are invited to participate by reviewing the tender documents and submitting their bids before the deadline on 2025-03-14.
The estimated tender value is Refer Document, and full details, including technical specifications and submission requirements, are provided in the official tender documents. Ensure all submissions meet the criteria outlined to be considered for evaluation.
